Interdisciplinary Applied Mathematics

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sponding PDE and boundary conditions for the equivalent circuit diagram are shown in Figure 18.26(b).

18.4 Software


Several software packages have been developed, both commercially and by universities, for the simulation of microsystems (including microfluidic systems) using macromodels. Table 18.2 presents some of the available software packages.


TABLE 18.2. Software packages for reduced-order modeling of MEMS and microfluidics.


Name


Manufacturer


Description


HDL-A


Mentor Graphics Inc.


Analog and mixed signal analysis (equivalent circuits for MEMS/microfluidics).


MAST/SABER


Synopsys Inc.


Analog and mixed signal analysis (equivalent circuits for MEMS/microfluidics).


SpectreHDL


Cadence Design Systems


Analog and mixed signal analysis (equivalent circuits for MEMS/microfluidics).


NODAS


Carnegie Mellon Univ.


A library of parameterized components for using SABER (Synopsys Inc.) nodal simulator to simulate MEMS devices.


SPICE


U of C, Berkeley


A general-purpose circuit simulation program for nonlinear dc, nonlinear transient , and linear ac analyses (equivalent circuits for MEMS/microfluidics).


SUGAR


U of C, Berkeley


An open source simulation tool for MEMS based on nodal analysis techniques.


AN SYS


Multiphysics


ANSY Inc.


Modal analysis, reduced-order models for fluid damping, system-level simulation.


MEMS Xplorer


MEMSCAP Inc.


System level simulation (Equivalent circuits for MEMS).


Coventor Ware


Coventor Inc.


Macromodels and system-level models for MEMS and microfluidics.

Bibliography


Abe, T. (1997). Derivation of the lattice Boltzmann method by means of the discrete ordinate method for the Boltzmann equation. J. Comp. Phys., 131:241-246.

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